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Treffer: Advanced process control extends ECMP process consistency.

Title:
Advanced process control extends ECMP process consistency.
Authors:
Manens, Antoine1, Miller, Paul1, Kollata, Eashwer1, Duboust, Alain1
Source:
Solid State Technology. Feb2006, Vol. 49 Issue 2, p56-58. 3p. 3 Graphs.
Subject Terms:
*PROCESS control systems, *INTEGRATED circuits, *CONTROL theory (Engineering), *AUTOMATIC control systems, *MANUFACTURING processes, SEMICONDUCTOR wafers
Database:
Business Source Premier

Weitere Informationen

The article focuses on the importance process control in reducing copper line variations of on-chip interconnects for the manufacturing node of integrated circuits. Moreover, advanced process control is necessary to maintain process consistency. Process control method is validated through extensive wafer testing.