Treffer: Advanced run-to-run control (AARC) tools.
Title:
Advanced run-to-run control (AARC) tools.
Source:
Solid State Technology. Dec99, Vol. 42 Issue 12, p46. 1p. 2 Graphs.
Subject Terms:
Database:
Business Source Premier
Weitere Informationen
Discusses the process adjustment mechanism in advanced run-to-run control. Empirical model builder included in process-engineering-friendly tools; Automatic on-line adaptive modeling; Basic control algorithm; Purpose of the process-metrology tool simulator.
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