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American Psychological Association 6th edition

Cheng, F.-T., & Chiu, Y.-C. (2013). Applying the Automatic Virtual Metrology system to obtain tube-to-tube control in a PECVD tool. IIE Transactions, 45(6), 670-681. https://doi.org/10.1080/0740817 X.2012.725507

ISO-690 (author-date, English)

CHENG, Fan-Tien und CHIU, Yu-Chen, 2013. Applying the Automatic Virtual Metrology system to obtain tube-to-tube control in a PECVD tool. IIE Transactions. 1 Juni 2013. Vol. 45, no. 6, p. 670-681. DOI 10.1080/0740817 X.2012.725507.

Modern Language Association 9th edition

Cheng, F.-T., und Y.-C. Chiu. „Applying the Automatic Virtual Metrology System to Obtain Tube-to-Tube Control in a PECVD Tool.“. IIE Transactions, Bd. 45, Nr. 6, Juni 2013, S. 670-81, https://doi.org/10.1080/0740817 X.2012.725507.

Mohr Siebeck - Recht (Deutsch - Österreich)

Cheng, Fan-Tien/Chiu, Yu-Chen: Applying the Automatic Virtual Metrology system to obtain tube-to-tube control in a PECVD tool., IIE Transactions 2013, 670-681.

Emerald - Harvard

Cheng, F.-T. und Chiu, Y.-C. (2013), „Applying the Automatic Virtual Metrology system to obtain tube-to-tube control in a PECVD tool.“, IIE Transactions, Vol. 45 No. 6, S. 670-681.

Achtung: Diese Zitate sind unter Umständen nicht zu 100% korrekt.