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American Psychological Association 6th edition

Chien, C.-F., Chen, Y.-J., Hsu, C.-Y., & Wang, H.-K. (2014). Overlay Error Compensation Using Advanced Process Control With Dynamically Adjusted Proportional-Integral R2 R Controller. IEEE Transactions on Automation Science & Engineering, 11(2), 473-484. https://doi.org/10.1109/TASE.2013.2280618

ISO-690 (author-date, English)

CHIEN, Chen-Fu, CHEN, Ying-Jen, HSU, Chia-Yu und WANG, Hung-Kai, 2014. Overlay Error Compensation Using Advanced Process Control With Dynamically Adjusted Proportional-Integral R2 R Controller. IEEE Transactions on Automation Science & Engineering. 1 April 2014. Vol. 11, no. 2, p. 473-484. DOI 10.1109/TASE.2013.2280618.

Modern Language Association 9th edition

Chien, C.-F., Y.-J. Chen, C.-Y. Hsu, und H.-K. Wang. „Overlay Error Compensation Using Advanced Process Control With Dynamically Adjusted Proportional-Integral R2 R Controller.“. IEEE Transactions on Automation Science & Engineering, Bd. 11, Nr. 2, April 2014, S. 473-84, https://doi.org/10.1109/TASE.2013.2280618.

Mohr Siebeck - Recht (Deutsch - Österreich)

Chien, Chen-Fu/Chen, Ying-Jen/Hsu, Chia-Yu/Wang, Hung-Kai: Overlay Error Compensation Using Advanced Process Control With Dynamically Adjusted Proportional-Integral R2 R Controller., IEEE Transactions on Automation Science & Engineering 2014, 473-484.

Emerald - Harvard

Chien, C.-F., Chen, Y.-J., Hsu, C.-Y. und Wang, H.-K. (2014), „Overlay Error Compensation Using Advanced Process Control With Dynamically Adjusted Proportional-Integral R2 R Controller.“, IEEE Transactions on Automation Science & Engineering, Vol. 11 No. 2, S. 473-484.

Achtung: Diese Zitate sind unter Umständen nicht zu 100% korrekt.