Krueger, C., Feudel, T., Rao, V., Waite, A., Zhao, Z., Falk, S., & Kim, Y.- ki. (2011, Januar 7). Achieving Uniform Device Performance by Using Advanced Process Control and Super Scan™. 1321(1). https://doi.org/10.1063/1.3548326
ISO-690 (author-date, English)KRUEGER, Christian, FEUDEL, Thomas, RAO, Vivek, WAITE, Andrew, ZHAO, Zhiyong, FALK, Scott und KIM, Youn-ki, 2011. Achieving Uniform Device Performance by Using Advanced Process Control and Super Scan™. In: . 7 Januar 2011.
Modern Language Association 9th editionKrueger, C., T. Feudel, V. Rao, A. Waite, Z. Zhao, S. Falk, und Y.- ki Kim. Achieving Uniform Device Performance by Using Advanced Process Control and Super Scan™. Nr. 1, 2011, https://doi.org/10.1063/1.3548326.
Mohr Siebeck - Recht (Deutsch - Österreich)Emerald - Harvard
Krueger, C., Feudel, T., Rao, V., Waite, A., Zhao, Z., Falk, S. und Kim, Y.- ki. (2011), „Achieving Uniform Device Performance by Using Advanced Process Control and Super Scan™.“, in , Bd. 1321, verfügbar unter:https://doi.org/10.1063/1.3548326.