Treffer: Thin film fully-depleted SOI four-gate transistors

Title:
Thin film fully-depleted SOI four-gate transistors
Source:
EUROSOI'06 Conference. Selected papersSolid-state electronics. 51(2):278-284
Publisher Information:
Oxford: Elsevier Science, 2007.
Publication Year:
2007
Physical Description:
print, 12 ref
Original Material:
INIST-CNRS
Document Type:
Konferenz Conference Paper
File Description:
text
Language:
English
Author Affiliations:
Institut de Microélectronique, Electromagnétisme et Photonique (IMEP), INPG-Minatec 3 Parvis Louis Néel, 38016 Grenoble, France
Université Catholique de Louvain, Louvain-la-Neuve 1348, Belgium
ECE Department, The University of Tennessee, Knoxville, TN 37996, United States
ISSN:
0038-1101
Rights:
Copyright 2007 INIST-CNRS
CC BY 4.0
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
Notes:
Electronics
Accession Number:
edscal.18658372
Database:
PASCAL Archive

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The fully-depleted version of the SOI four-gate transistor (G4-FET) is introduced and its characteristics are systematically investigated. It is shown that the thinning-down of the silicon film promotes vertical coupling between the front and the back gates while mitigating the horizontal coupling between the lateral gates. As a consequence the direct influence of the lateral junction-gates on the body potential distribution is reduced. However, by biasing the back interface in inversion the junction-gates can indirectly modulate the body potential. This provides a very efficient control of the front-channel conduction parameters - such as threshold voltage, subthreshold swing and transconductance - by the junction-gates regardless the device width. The experimental results are clarified by 3-D device simulations and analytical modelling.