Treffer: Thermomechanical response of membrane-like MEMS component
Title:
Thermomechanical response of membrane-like MEMS component
Authors:
Source:
Proceedings of the 32nd International Conference on Micro- and Nano-Engineering, Barcelona, 17-20 September 2006Microelectronic engineering. 84(5-8):1274-1277
Publisher Information:
Amsterdam: Elsevier Science, 2007.
Publication Year:
2007
Physical Description:
print, 6 ref
Original Material:
INIST-CNRS
Subject Terms:
Electronics, Electronique, Sciences exactes et technologie, Exact sciences and technology, Sciences appliquees, Applied sciences, Electronique, Electronics, Electronique des semiconducteurs. Microélectronique. Optoélectronique. Dispositifs à l'état solide, Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices, Dispositifs thermoélectriques, pyroélectriques, etc, Thermoelectric, pyroelectric devices, etc, Fabrication microélectronique (technologie des matériaux et des surfaces), Microelectronic fabrication (materials and surfaces technology), Dispositifs micro- et nanoélectromécaniques (mems/nems), Micro- and nanoelectromechanical devices (mems/nems), Circuits électriques, optiques et optoélectroniques, Electric, optical and optoelectronic circuits, Propriétés des circuits, Circuit properties, Circuits électroniques, Electronic circuits, Convertisseurs de signal, Signal convertors, Caractéristique dynamique, Dynamic characteristic, Característica dinámica, Conception assistée, Computer aided design, Concepción asistida, Conception circuit, Circuit design, Diseño circuito, Constante temps, Time constant, Constante tiempo, Convertisseur courant continu, Direct current convertor, Convertidor corriente continua, Convertisseur thermoélectrique, Thermoelectric convertor, Convertidor termoeléctrico, Dispositif microélectromécanique, Microelectromechanical device, Dispositivo microelectromecánico, Dopplérométrie laser, Laser dopplerometry, Dopplerometría laser, Déformation, Deformation, Deformación, Dépendance du temps, Time dependence, Dependencia del tiempo, Détecteur de gaz, Gas detector, Detector de gas, Effet température, Temperature effect, Efecto temperatura, Electroélasticité, Electroelasticity, Electroelasticidad, Fabrication microélectronique, Microelectronic fabrication, Fabricación microeléctrica, Mesure optique, Optical measurement, Medida óptica, Microusinage, Micromachining, Micromaquinado, Méthode mesure, Measurement method, Método medida, Méthode optique, Optical method, Método óptico, Propriété thermomécanique, Thermomechanical properties, Propriedad termomecánica, Propriété électromécanique, Electromechanical properties, Propiedad electromecánica, Signal entrée, Input signal, Señal entrada, Vélocimètre laser Doppler, Laser Doppler velocimeters, 0707D, Laser doppler vibrometer, Laser-based metrology, Membrane components
Document Type:
Konferenz
Conference Paper
File Description:
text
Language:
English
Author Affiliations:
International Laser Centre, llkovicova 3, 812 19 Bratislava, Slovakia
Department of Experimental Physics, Faculty of Mathematics, Physics and Informatics, Comenius University, Mlynskd dolina, 842 48 Bratislava, Slovakia
Institute of Electrical Engineering, Slovak Academy of Sciences, 842 39 Bratislava, Slovakia
Department of Experimental Physics, Faculty of Mathematics, Physics and Informatics, Comenius University, Mlynskd dolina, 842 48 Bratislava, Slovakia
Institute of Electrical Engineering, Slovak Academy of Sciences, 842 39 Bratislava, Slovakia
ISSN:
0167-9317
Rights:
Copyright 2007 INIST-CNRS
CC BY 4.0
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
CC BY 4.0
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
Notes:
Electronics
Accession Number:
edscal.18807426
Database:
PASCAL Archive
Weitere Informationen
Basic electro-thermo-mechanical properties of micromachined GaAs/AlGaAs based thermal converter (MTC) device for gas sensors were characterized. Optical measurements of thermally induced deformations have been performed using laser doppler vibrometer (LDV). The results were obtained for the time dependence of the membrane MEMS element deflections as a response to input thermal power-max. 11 μm central deflection at the temperature difference of 350 K. The measured transient temperature time constant τ = 1.48 ms coincides well with the value obtained by 2-D FEM simulation. An important influence of temperature changes on mechanical behaviour including dynamic vibration instability was demonstrated. The optical method was proved to be useful and effective MEMS design tool.