• Ellipsometric data analysis us...

Treffer: Ellipsometric data analysis used in on-line metal passivation monitoring

Title:
Ellipsometric data analysis used in on-line metal passivation monitoring
Authors:
BOGDANOWICZ, R, RYL, J
Source:
Advances in atomic and molecular spectroscopyThe European physical journal. Special topics. 144:215-220
Publisher Information:
[S.l.]; [S.l.]: EDP Sciences, Springer, 2007.
Publication Year:
2007
Physical Description:
print, 14 ref
Original Material:
INIST-CNRS
Subject Terms:
Physics, Physique, Sciences exactes et technologie, Exact sciences and technology, Physique, Physics, Generalites, General, Instruments, appareillage, composants et techniques communs à plusieurs branches de la physique et de l'astronomie, Instruments, apparatus, components and techniques common to several branches of physics and astronomy, Informatique en physique expérimentale, Computers in experimental physics, Analyse de données: algorithmes et implémentations; gestion de données, Data analysis: algorithms and implementation; data management, Instrumentation, équipement et techniques optiques, Optical instruments, equipment and techniques, Polarimètres et ellipsomètres, Polarimeters and ellipsometers, Analyse donnée, Data analysis, Conversion énergie, Energy conversion, Couche mince, Thin films, Ellipsométrie, Ellipsometry, Energie solaire, Solar energy, Epaisseur couche, Layer thickness, Espesor capa, Erreur quadratique moyenne, Mean square error, Error medio cuadrático, Etude théorique, Theoretical study, Indice réfraction, Refractive index, Modèle milieu effectif, Effective medium model, Modelo medio efectivo, Multicouche, Multilayers, Méthode mesure, Measuring methods, Méthode optimisation, Optimization method, Método optimización, Méthode optique, Optical method, Método óptico, Oxyde métallique, Metal oxides, Photocatalyse, Photocatalysis, Fotocatálisis, 0705K, 0760F
Document Type:
Konferenz Conference Paper
File Description:
text
Language:
English
Author Affiliations:
Gdansk University of Technology, Department of Optoelectronics, Narutowicza 11/12 Street, 80-952 Gdańsk, Poland
Gdańsk University of Technology, Department of Electrochemistry, Corrosion and Materials Engineering Narutowicza 11/12 Street, 80-952 Gdańsk, Poland
Access URL:
http://pascal-francis.inist.fr/vibad/index.php?action=search&terms=18956806
Rights:
Copyright 2007 INIST-CNRS
CC BY 4.0
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
Notes:
Metrology
Accession Number:
edscal.18956806
Database:
PASCAL Archive

Weitere Informationen

Metal oxide thin films, suitable for use on solar energy converters and photocatalitic applications, have been characterized on-line by ellipsometric monitoring system. Ellipsometry is a powerful and non-invasive technique of film analysis but it is indirect tool. The most interesting parameters such as film thickness and complex refractive indices can be determined only by computer sample modelling. The complex reflection coefficients obtained from model calculation were compared with ellipsometric measurements. We discuss composition of multilayer film structure using various models and fittings method. The implementation of effective medium approximation procedure enables to interpret multilayer oxides structure formation during passivation process. It is shown that an accurate model fitting was obtained using Levenberg-Marquardt optimization algorithm and multidimensional mean square error.