Result: Modeling, design, and verification for the analog front-end of a MEMS-based parallel scanning-probe storage device

Title:
Modeling, design, and verification for the analog front-end of a MEMS-based parallel scanning-probe storage device
Authors:
HAGLEITNER, Christoph, BONACCIO, Tony, ROTHUIZEN, Hugo, LIENEMANN, Jan, WIESMANN, Dorothea, CHERUBINI, Giovanni, KORVINK, Jan G, ELEFTHERIOU, Evangelos
Source:
Special issue on the CICC 2006IEEE journal of solid-state circuits. 42(8):1779-1789
Publisher Information:
New York, NY: Institute of Electrical and Electronics Engineers, 2007.
Publication Year:
2007
Physical Description:
print, 27 ref
Original Material:
INIST-CNRS
Subject Terms:
Electronics, Electronique, Sciences exactes et technologie, Exact sciences and technology, Physique, Physics, Generalites, General, Instruments, appareillage, composants et techniques communs à plusieurs branches de la physique et de l'astronomie, Instruments, apparatus, components and techniques common to several branches of physics and astronomy, Techniques et équipements généraux, General equipment and techniques, Capteurs (chimiques, optiques, électriques, de mouvement, de gaz, etc.); télédétection, Sensors (chemical, optical, electrical, movement, gas, etc.); remote sensing, Sciences appliquees, Applied sciences, Electronique, Electronics, Electronique des semiconducteurs. Microélectronique. Optoélectronique. Dispositifs à l'état solide, Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices, Circuits intégrés, Integrated circuits, Conception. Technologies. Analyse fonctionnement. Essais, Design. Technologies. Operation analysis. Testing, Dispositifs micro- et nanoélectromécaniques (mems/nems), Micro- and nanoelectromechanical devices (mems/nems), Analyse comportementale, Behavioral analysis, Análisis conductual, Capteur mesure, Measurement sensor, Captador medida, Circuit interface, Interface circuit, Circuito intercara, Circuit intégré analogique, Analogue integrated circuits, Circuit intégré, Integrated circuit, Circuito integrado, Circuit paramètre localisé, Lumped parameter circuit, Circuito parámetro localizado, Dispositif balayage, Scanning device, Dispositivo barrido, Dispositif microélectromécanique, Microelectromechanical device, Dispositivo microelectromecánico, Elément chauffant, Heating element, Elemento calentador, Indentation, Indentación, Microscopie force atomique, Atomic force microscopy, Microscopía fuerza atómica, Modèle électrique, Electrical model, Modelo eléctrico, Modélisation, Modeling, Modelización, Méthode numérique, Numerical method, Método numérico, Méthode élément fini, Finite element method, Método elemento finito, Nanotechnologie, Nanotechnology, Nanotecnología, Polymère, Polymer, Polímero, Poutre cantilever, Cantilever beam, Viga cantilever, Système mémoire, Storage system, Sistema memoria, 0707D, Analog integrated circuits, MEMS interface circuits, integrated circuit modeling, model-order reduction, multidomain modeling, nanotechnology, sensor interface circuits
Document Type:
Conference Conference Paper
File Description:
text
Language:
English
Author Affiliations:
IBM Research, Zurich Research Laboratory, 8803 Rüschlikon, Switzerland
IBM Microelectronics Division, Essex Junction, VT 05452, United States
University of Freiburg, Department of Microsystems Engineering (IMTEK), 79110 Freiburg, Germany
ISSN:
0018-9200
Access URL:
http://pascal-francis.inist.fr/vibad/index.php?action=search&terms=18990840
Rights:
Copyright 2007 INIST-CNRS
CC BY 4.0
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
Notes:
Electronics

Metrology
Accession Number:
edscal.18990840
Database:
PASCAL Archive

Further Information

We present an integrated analog front-end (AFE) for the read-channel of a parallel scanning-probe storage device. The read/write element is based on an array of microfabricated silicon cantilevers equipped with heating elements to form nanometer-sized indentations in a polymer surface using integral atomic-force microscope (AFM) tips. An accurate cantilever model based on the combination of a thermal/electrical lumped-element model and a behavioral model of the electrostatic/mechanical part are introduced. The behavioral model of the electrostatic/mechanical part is automatically generated from a full finite-element model (FEM). The model is completely implemented in Verilog-A and was used to co-develop the integrated analog front-end circuitry together with the read/write cantilever. The cantilever model and the analog front-end were simulated together and the results were experimentally verified. The approach chosen is well suited for system-level simulation and verification/extraction in a design environment based on standard EDA tools.