Treffer: Vibrational energy scavenging with Si technology electromagnetic inertial microgenerators

Title:
Vibrational energy scavenging with Si technology electromagnetic inertial microgenerators
Source:
Symposium on Design, Test, Integration, and packaging of MEMS/MOEMS, Stresa, Italy, 26-28 April 2006Microsystem technologies. 13(11-12):1655-1661
Publisher Information:
Berlin: Springer, 2007.
Publication Year:
2007
Physical Description:
print, 1/4 p
Original Material:
INIST-CNRS
Subject Terms:
Electronics, Electronique, Mechanical engineering, Génie mécanique, Metrology and instrumentation, Métrologie et instrumentation, Sciences exactes et technologie, Exact sciences and technology, Physique, Physics, Generalites, General, Instruments, appareillage, composants et techniques communs à plusieurs branches de la physique et de l'astronomie, Instruments, apparatus, components and techniques common to several branches of physics and astronomy, Techniques et équipements généraux, General equipment and techniques, Transducteurs, Transducers, Techniques, équipements et instruments mécaniques, Mechanical instruments, equipment and techniques, Systèmes et dispositifs micromécaniques, Micromechanical devices and systems, Sciences appliquees, Applied sciences, Electronique, Electronics, Electronique des semiconducteurs. Microélectronique. Optoélectronique. Dispositifs à l'état solide, Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices, Fabrication microélectronique (technologie des matériaux et des surfaces), Microelectronic fabrication (materials and surfaces technology), Genie mecanique. Construction mecanique, Mechanical engineering. Machine design, Mécanique de précision. Horlogerie, Precision engineering, watch making, Aimant, Magnets, Dispositif électromagnétique, Electromagnetic devices, Membrane, Membranes, Modélisation, Modelling, Optimisation, Optimization, Résonateur, Resonators, Structure résonnante, Resonant structure, Estructura resonante
Document Type:
Konferenz Conference Paper
File Description:
text
Language:
English
Author Affiliations:
Electronica Department, Universitat de Barcelona, C/Marti i Franques, 1, 08028 Barcelona, Spain
Centre Nacional de Microelectrônica CNM-CSIC, Campus UAB, 08193 Bellaterra, Spain
ISSN:
0946-7076
Rights:
Copyright 2007 INIST-CNRS
CC BY 4.0
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
Notes:
Electronics

Mechanical engineering. Mechanical construction. Handling

Metrology
Accession Number:
edscal.19069762
Database:
PASCAL Archive

Weitere Informationen

In this work, we present the design and optimization of an electromagnetic inertial microgenerator for energy scavenging applications, compatible with Si technology. It consists of a fixed micromachined coil and a movable magnet (inertial mass) mounted on a resonant structure (Kapton® membrane). The modeling of the device, based on a velocity damped resonator, has allowed to make a quantitative analysis of the capabilities of this simple device structure for the development of power generators for autonomous microsystem applications. The characterization of a first (not optimized) prototype has allowed the validation of the model, which is then used as a roadmap for a number of optimizations for the final device design. For this design, the model developed shows the possibility to achieve power levels up to hundreds of μW's, with voltage levels compatible with the requirements of standard rectifying circuits.