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Treffer: Defect detection of IC wafer based on two-dimension wavelet transform

Title:
Defect detection of IC wafer based on two-dimension wavelet transform
Authors:
HONGXIA LIU, WEN ZHOU, QIANWEI KUANG, LEI CAO, BO GAO
Source:
Microelectronics journal. 41(2-3):171-177
Publisher Information:
Kidlington: Elsevier, 2010.
Publication Year:
2010
Physical Description:
print, 20 ref
Original Material:
INIST-CNRS
Subject Terms:
Electronics, Electronique, Sciences exactes et technologie, Exact sciences and technology, Sciences appliquees, Applied sciences, Electronique, Electronics, Essais, mesure, bruit et fiabilité, Testing, measurement, noise and reliability, Electronique des semiconducteurs. Microélectronique. Optoélectronique. Dispositifs à l'état solide, Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices, Circuits intégrés, Integrated circuits, Conception. Technologies. Analyse fonctionnement. Essais, Design. Technologies. Operation analysis. Testing, Circuit intégré, Integrated circuit, Circuito integrado, Complexité algorithme, Algorithm complexity, Complejidad algoritmo, Défaut, Defect, Defecto, Détection défaut, Defect detection, Detección imperfección, Echelle gris, Gray scale, Escala gris, Eclairement, Illumination, Alumbrado, Modèle 2 dimensions, Two dimensional model, Modelo 2 dimensiones, Pastille électronique, Wafer, Pastilla electrónica, Robustesse, Robustness, Robustez, Transformation discrète, Discrete transformation, Transformación discreta, Transformation ondelette, Wavelet transformation, Transformación ondita, Integrated circuit (IC) wafer, Two-dimension wavelet transform
Document Type:
Fachzeitschrift Article
File Description:
text
Language:
English
Author Affiliations:
Key Lab of Ministry of Education for Wide Band-Gap Semiconductor Devices, School of Microelectronics, Xidian University, Xi'an, Shaanxi 710071, China
ISSN:
0959-8324
Access URL:
http://pascal-francis.inist.fr/vibad/index.php?action=search&terms=22615992
Rights:
Copyright 2015 INIST-CNRS
CC BY 4.0
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
Notes:
Electronics
Accession Number:
edscal.22615992
Database:
PASCAL Archive

Weitere Informationen

Defect detection of integrated circuit (IC) wafer based on two-dimension wavelet transform (2-D DWT) is presented in this paper. By utilizing the characteristics many of the same chips in a wafer, three images with defects located in the same position and different chips are obtained. The defect images contain the standard image without any defects. 2-D DWT presented in the paper can extract the standard image from the three defect images. The algorithm complexity of the method is close to that of 2-D DWT. After obtaining the standard image, the speed and accuracy of defects detection can be greatly enhanced using the detection method presented in the paper. Using the image gray-scale matching technology, impact of illumination on IC defect detection is solved. Experiments demonstrate that 2-D DWT is fast and accurate to defects detection in an IC image, and the method has high robustness for illumination.