Treffer: Two-dimensional optical micro-scanner on silicon technology
Title:
Two-dimensional optical micro-scanner on silicon technology
Source:
Optik (Stuttgart). 121(9):843-846
Publisher Information:
Reutlingen: Elsevier, 2010.
Publication Year:
2010
Physical Description:
print, 11 ref
Original Material:
INIST-CNRS
Subject Terms:
Optics, Optique, Sciences exactes et technologie, Exact sciences and technology, Physique, Physics, Domaines classiques de la physique (y compris les applications), Fundamental areas of phenomenology (including applications), Optique, Optics, Optique géométrique, Geometrical optics, Conception des systèmes optiques, Optical system design, Formation des images et traitement optique, Imaging and optical processing, Fonctions de transfert optique et de transfert de modulation, Modulation and optical transfer functions, Dispositif balayage optique, Optical scanners, Fonction transfert modulation, Modulation transfer function, Función transferencia modulación, Limite résolution, Resolving power, Poder resolución, Microoptique, Micro-optics, Miroir, Mirrors, Optique géométrique, Geometrical optics, Optique intégrée, Integrated optics, Silicium, Silicon, Système optique, Optical systems, Technique conception optique, Optical design techniques, 4215E, 4230L, Micro-mirrors, Micro-optical systems, Optical design, Oslo
Document Type:
Fachzeitschrift
Article
File Description:
text
Language:
English
Author Affiliations:
Departament of Optics, Instituto Nacional de Astrofísica, Óptica y Electrónica, 1, Luis Enrique Erro, Tonantzintla, Puebla 72840, Mexico
ISSN:
0030-4026
Rights:
Copyright 2015 INIST-CNRS
CC BY 4.0
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
CC BY 4.0
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
Notes:
Physics: optics
Accession Number:
edscal.22616683
Database:
PASCAL Archive
Weitere Informationen
A two-dimensional optical micro-scanner, which main components are two mobile flat and a concave micro-mirrors, is designed such that, all optical components can be fabricated on the same substratum. The optical parameters, which physical dimensions are between 50 and 500 μm, are obtained within the geometrical optics. The optical performance is evaluated by means of the MTF and Rayleigh resolution criteria, given 80% of modulation for a frequency of 8 cycles/ mm with a Gaussian source, the resolution limit is 30 μm.