Thickness tolerance compensation of SIL first surface near-field recording with replicated lens on SIL - YOON, Yong-Joong; CHOI, Hyun; KIM, Wan-Chin; SONG, Taesun; PARK, No-Cheol (ASME/ISPS/JSME-IIP Joint conference on micromechatronics for information and precision equipment, Santa Clara, California, USA, 2006, 2007)
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