Treffer: Proximal policy optimization with population-based variable neighborhood search algorithm for coordinating photo-etching and acid-etching processes in sustainable storage chip manufacturing

Title:
Proximal policy optimization with population-based variable neighborhood search algorithm for coordinating photo-etching and acid-etching processes in sustainable storage chip manufacturing
Authors:
Zhang, Weijian a, Kong, Min a, b, ⁎, Zhang, Yajing a, Fathollahi-Fard, Amir M. c, d, e, ⁎
Source:
In Journal of Industrial Information Integration November 2024 42
Database:
ScienceDirect