Treffer: Wafer sub-pixel alignment based on multi-scale residual channel attention network and multi-strategy improved sparrow search algorithm
Title:
Wafer sub-pixel alignment based on multi-scale residual channel attention network and multi-strategy improved sparrow search algorithm
Authors:
Liang, Wanyong, Jia, WeilinAff1, Shi, JunAff1, Xie, ZehuiAff1, IDs00170025162379_cor1, Hu, YangyangAff2, Cao, WeifengAff1
Source:
The International Journal of Advanced Manufacturing Technology. :1-16
Database:
Springer Nature Journals