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Treffer: Special Section on Advanced Process Control.

Title:
Special Section on Advanced Process Control.
Authors:
Moyne, James R.1, Patel, Nital S.2
Source:
IEEE Transactions on Semiconductor Manufacturing. Nov2007, Vol. 20 Issue 4, p343-344. 2p. 2 Black and White Photographs.
Subject Terms:
*PROCESS control systems, *AUTOMATIC control systems, *SEMICONDUCTOR industry, *CONTROL theory (Engineering), *QUALITY control
Database:
Business Source Premier

Weitere Informationen

The article provides information related to advanced process control (APC). The author relates that APC has evolved from an emerging technology found only on research process lines to a required component for fab competitiveness. The International Technology Roadmap for Semiconductors identifies APC as a critical component of factory information and control systems.