Treffer: Influence of circuit pattern layout on characteristics of interface-modified ramp-edge junctions
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Electronics
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-We have developed a fabrication process for single flux quantum (SFQ) circuits including a superconducting ground plane and interface-modified ramp-edge Josephson junctions. We found that the critical current density (Jc) for individual junctions in a circuit was influenced by the circuit pattern layout. The dependence of the Ic value for 5-/μm-width junctions on the base-electrode size (width and length) and the contact-hole area was carefully examined. We obtained 1-sigma Jc spreads less than 8% for junctions in actual circuits by employing a new circuit pattern layout, containing separated base-electrodes with almost the same size. We also employed connection of the separated base-electrodes by the counter-layer to reduce parasitic inductance. By employing. new layouts based on the separated base-electrode layout (SBL) method, control of Ic values by changing the junction width was readily achieved.