Result: Yield analysis via induction of process statistics into the design of MEMS and other microsystems
Title:
Yield analysis via induction of process statistics into the design of MEMS and other microsystems
Authors:
Source:
Symposium on Design, Test, Integration, and packaging of MEMS/MOEMS, Stresa, Italy, 26-28 April 2006Microsystem technologies. 13(11-12):1545-1551
Publisher Information:
Berlin: Springer, 2007.
Publication Year:
2007
Physical Description:
print, 1/2 p
Original Material:
INIST-CNRS
Subject Terms:
Electronics, Electronique, Mechanical engineering, Génie mécanique, Metrology and instrumentation, Métrologie et instrumentation, Sciences exactes et technologie, Exact sciences and technology, Physique, Physics, Generalites, General, Instruments, appareillage, composants et techniques communs à plusieurs branches de la physique et de l'astronomie, Instruments, apparatus, components and techniques common to several branches of physics and astronomy, Techniques, équipements et instruments mécaniques, Mechanical instruments, equipment and techniques, Systèmes et dispositifs micromécaniques, Micromechanical devices and systems, Sciences appliquees, Applied sciences, Electronique, Electronics, Electronique des semiconducteurs. Microélectronique. Optoélectronique. Dispositifs à l'état solide, Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices, Fabrication microélectronique (technologie des matériaux et des surfaces), Microelectronic fabrication (materials and surfaces technology), Genie mecanique. Construction mecanique, Mechanical engineering. Machine design, Mécanique de précision. Horlogerie, Precision engineering, watch making, Analyse statistique, Statistical analysis, Approche probabiliste, Probabilistic approach, Enfoque probabilista, Dispositif microélectromécanique, Microelectromechanical device, Dispositivo microelectromecánico, Modélisation, Modelling, Processus conception, Design process, Proceso concepcion, Processus fabrication, Production process, Proceso fabricación, Préparation gamme fabrication, Process planning, Preparación serie fabricación, Structure produit, Product structure, Estructura producto
Document Type:
Conference
Conference Paper
File Description:
text
Language:
English
Author Affiliations:
Institute for Electromagnetic Theory and Microelectronics (ITEM), University of Bremen, P.O. Box 330440, 28334 Bremen, Germany
Center of Industrial Mathematics (ZeTeM), University of Bremen, P.O. Box 330440, 28334 Bremen, Germany
Center of Industrial Mathematics (ZeTeM), University of Bremen, P.O. Box 330440, 28334 Bremen, Germany
ISSN:
0946-7076
Rights:
Copyright 2007 INIST-CNRS
CC BY 4.0
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
CC BY 4.0
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
Notes:
Electronics
Mechanical engineering. Mechanical construction. Handling
Metrology
Mechanical engineering. Mechanical construction. Handling
Metrology
Accession Number:
edscal.19069747
Database:
PASCAL Archive
Further Information
This paper presents an emerging theory on the effects of unavoidable process variations during the fabrication of MEMS and other microsystems. The effects of parametric variations on device performance and design yield of the microsystems devices are analyzed and presented. A novel methodology in the design cycle of MEMS and other microsystems is introduced. The methodology is based on the concept of worst-case analysis having colossal advantages to offer. This paper describes some steps of this methodology with elaborated results. Also described in this paper is how each step contributes to counteract the effects produced by the parametric variations in the product cycle of microsystems.