SHYAM PRAVEEN VUDATHU, KISHORE KUMAR DUGANAPALLI, LAUR, R., KUBALINSKA, D., & BUNSE-GERSTNER, A. (2007, Januar 1). Yield analysis via induction of process statistics into the design of MEMS and other microsystems. 13(11-12). Berlin: Springer, 2007. Abgerufen von http://pascal-francis.inist.fr/vibad ndex.php?action=search&terms=19069747

SHYAM PRAVEEN VUDATHU, KISHORE KUMAR DUGANAPALLI, LAUR, Rainer, KUBALINSKA, Dorota und BUNSE-GERSTNER, Angelika, 2007. Yield analysis via induction of process statistics into the design of MEMS and other microsystems. In: [online]. Berlin: Springer, 2007. 1 Januar 2007. Available from: http://pascal-francis.inist.fr/vibad ndex.php?action=search&terms=19069747

SHYAM PRAVEEN VUDATHU, KISHORE KUMAR DUGANAPALLI, R. LAUR, D. KUBALINSKA, und A. BUNSE-GERSTNER. Yield analysis via induction of process statistics into the design of MEMS and other microsystems. Nr. 11-12, Berlin: Springer, 2007., 2007, http://pascal-francis.inist.fr/vibad ndex.php?action=search&terms=19069747.

SHYAM PRAVEEN VUDATHU, KISHORE KUMAR DUGANAPALLI, LAUR, R., KUBALINSKA, D. und BUNSE-GERSTNER, A. (2007), „Yield analysis via induction of process statistics into the design of MEMS and other microsystems“, in , Bd. 13, Berlin: Springer, 2007., verfügbar unter: http://pascal-francis.inist.fr/vibad ndex.php?action=search&terms=19069747.