SHYAM PRAVEEN VUDATHU, KISHORE KUMAR DUGANAPALLI, LAUR, R., KUBALINSKA, D., & BUNSE-GERSTNER, A. (2007, January 1). Yield analysis via induction of process statistics into the design of MEMS and other microsystems. 13(11-12). Berlin: Springer, 2007. Retrieved from http://pascal-francis.inist.fr/vibad ndex.php?action=search&terms=19069747
ISO-690 (author-date, English)SHYAM PRAVEEN VUDATHU, KISHORE KUMAR DUGANAPALLI, LAUR, Rainer, KUBALINSKA, Dorota and BUNSE-GERSTNER, Angelika, 2007. Yield analysis via induction of process statistics into the design of MEMS and other microsystems. In: [online]. Berlin: Springer, 2007. 1 January 2007. Available from: http://pascal-francis.inist.fr/vibad ndex.php?action=search&terms=19069747
Modern Language Association 9th editionSHYAM PRAVEEN VUDATHU, KISHORE KUMAR DUGANAPALLI, R. LAUR, D. KUBALINSKA, and A. BUNSE-GERSTNER. Yield analysis via induction of process statistics into the design of MEMS and other microsystems. no. 11-12, Berlin: Springer, 2007., 2007, http://pascal-francis.inist.fr/vibad ndex.php?action=search&terms=19069747.
Mohr Siebeck - Recht (Deutsch - Österreich)Emerald - Harvard
SHYAM PRAVEEN VUDATHU, KISHORE KUMAR DUGANAPALLI, LAUR, R., KUBALINSKA, D. and BUNSE-GERSTNER, A. (2007), “Yield analysis via induction of process statistics into the design of MEMS and other microsystems”, in , Vol. 13, Berlin: Springer, 2007., available at: http://pascal-francis.inist.fr/vibad ndex.php?action=search&terms=19069747.