• Thickness tolerance compensati...

Treffer: Thickness tolerance compensation of SIL first surface near-field recording with replicated lens on SIL

Title:
Thickness tolerance compensation of SIL first surface near-field recording with replicated lens on SIL
Authors:
YOON, Yong-Joong, CHOI, Hyun, KIM, Wan-Chin, SONG, Taesun, PARK, No-Cheol
Source:
ASME/ISPS/JSME-IIP Joint conference on micromechatronics for information and precision equipment, Santa Clara, California, USA, 2006Microsystem technologies. 13(8-10):1289-1295
Publisher Information:
Berlin: Springer, 2007.
Publication Year:
2007
Physical Description:
print, 1/4 p
Original Material:
INIST-CNRS
Subject Terms:
Electronics, Electronique, Mechanical engineering, Génie mécanique, Metrology and instrumentation, Métrologie et instrumentation, Sciences exactes et technologie, Exact sciences and technology, Physique, Physics, Generalites, General, Instruments, appareillage, composants et techniques communs à plusieurs branches de la physique et de l'astronomie, Instruments, apparatus, components and techniques common to several branches of physics and astronomy, Techniques, équipements et instruments mécaniques, Mechanical instruments, equipment and techniques, Systèmes et dispositifs micromécaniques, Micromechanical devices and systems, Sciences appliquees, Applied sciences, Electronique, Electronics, Electronique des semiconducteurs. Microélectronique. Optoélectronique. Dispositifs à l'état solide, Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices, Fabrication microélectronique (technologie des matériaux et des surfaces), Microelectronic fabrication (materials and surfaces technology), Genie mecanique. Construction mecanique, Mechanical engineering. Machine design, Mécanique de précision. Horlogerie, Precision engineering, watch making, Aberration sphérique, Spherical aberration, Aberración esférica, Angle inclinaison, Tilt angle, Angulo inclinación, Champ intense, High field, Campo intenso, Champ proche, Near field, Campo próximo, Lentille asphérique, Aspherical lens, Lente asférico, Lentille immersion solide, Solid immersion lens, Lenteja immersión sólida, Microlentille, Microlens, Microlente, Optique, Optics, Optica
Document Type:
Konferenz Conference Paper
File Description:
text
Language:
English
Author Affiliations:
Center for Information Storage Device, Yonsei University, 134, Sinchon-dong, Seodaemoon-gu, Seoul 120-749, Korea, Republic of
ISSN:
0946-7076
Access URL:
http://pascal-francis.inist.fr/vibad/index.php?action=search&terms=18756665
Rights:
Copyright 2007 INIST-CNRS
CC BY 4.0
Sauf mention contraire ci-dessus, le contenu de cette notice bibliographique peut être utilisé dans le cadre d’une licence CC BY 4.0 Inist-CNRS / Unless otherwise stated above, the content of this bibliographic record may be used under a CC BY 4.0 licence by Inist-CNRS / A menos que se haya señalado antes, el contenido de este registro bibliográfico puede ser utilizado al amparo de una licencia CC BY 4.0 Inist-CNRS
Notes:
Electronics

Mechanical engineering. Mechanical construction. Handling

Metrology
Accession Number:
edscal.18756665
Database:
PASCAL Archive

Weitere Informationen

In this paper, we propose a novel optics design for improving the thickness tolerance of a super-hemispherical solid immersion lens (SIL) that is usually used in near-field recording for high data density. To obtain the improved thickness tolerance of a SIL and a high numerical aperture simultaneously, an aspheric replicated lens is added on the SIL. Using an additional aspheric replicated lens, spherical aberration which induces the tight thickness tolerance of the SIL is effectively reduced, therefore it was able to improve the thickness tolerance of the SIL, maintaining high NA equal to that of super-hemispherical SIL. In addition, in this paper, other various tolerances such as decenter and tilt are considered to make sure of the possibility of fabrication.